A MEMS bistable device with push-on-push-off capability
Journal
Journal of Microelectromechanical Systems
Journal Volume
22
Journal Issue
1
Pages
7-9
Date Issued
2013
Author(s)
Abstract
This letter presents a novel MEMS bistable device that requires only one independent driving source for switching between its two stable states. The proposed device employs a mechanically push-on-push-off mechanism consisting of two curved beam structures. An integrated V-beam actuator (VBA) is used as the only actuation component. The proposed device can be easily realized on a silicon-on-insulator wafer by using the inductively coupled plasma (ICP) etching process with a single photomask. Preliminary measurement results show that a 30-ms pulse of 7.2 V applied to the VBA can drive the device from the off state to the on state, and a 50-ms pulse of 7.2 V can release the device from the on state back to the off state. Transient displacement results measured by using a vibrometer are also provided.
SDGs
Type
journal article