A mask-free fabrication of SU-8/silicon spherical microprobe
Journal
Microelectronic Engineering
Journal Volume
88
Journal Issue
8
Pages
2129-2131
Date Issued
2011
Author(s)
Abstract
This paper presents a self-assembly formation of SU-8 microspheres integrated with a self-alignment fabrication of silicon pillars for realizing contact microprobes, which can be used to determine the profile of high-aspect-ratio micro-structures. This new process combines an SU-8 microsphere and a silicon pillar to form one mechanical device. The SU-8 microspheres were assembled by interfacial tension against a NaDBS solution. The pillars were patterned by the microlens-assisted self-writing of SU-8 resist waveguides. This process enables the center of the microsphere to accurately coincide with the longitudinal axis of the pillar, and hence the measurement error resulting from the probe can be significantly reduced. The high-aspect-ratio pillar consists of a SU-8 portion and a silicon portion which was fabricated by deep reactive ion etching. © 2011 Elsevier B.V. All rights reserved.
Type
journal article