The ferroelectricity and crystallinity of zirconia, hafnia and hafnium zirconium oxide (HZO) ultrathin films prepared by atomic layer deposition with and without post-annealing
Journal
ASME 2018 Conference on Smart Materials, Adaptive Structures and Intelligent Systems
Journal Volume
1
ISBN
9780791851944
Date Issued
2018
Author(s)
Publisher
American Society of Mechanical Engineers (ASME)
Type
conference paper