https://scholars.lib.ntu.edu.tw/handle/123456789/433223
標題: | The ferroelectricity and crystallinity of zirconia, hafnia and hafnium zirconium oxide (HZO) ultrathin films prepared by atomic layer deposition with and without post-annealing | 作者: | Hsu T.-Y. Lin B.-T. Shieh J. TZONG-LIN JAY SHIEH MIIN-JANG CHEN |
公開日期: | 2018 | 出版社: | American Society of Mechanical Engineers (ASME) | 卷: | 1 | 來源出版物: | ASME 2018 Conference on Smart Materials, Adaptive Structures and Intelligent Systems | URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85057372073&doi=10.1115%2fSMASIS2018-7946&partnerID=40&md5=ccfa64bbaf90e7623050a40cc35c1375 https://scholars.lib.ntu.edu.tw/handle/123456789/433223 |
ISBN: | 9780791851944 | DOI: | 10.1115/SMASIS2018-7946 |
顯示於: | 材料科學與工程學系 |
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