Uniform and Fatigue-Free Ferroelectric HZO with Record EBD of 6.3MV/cm and Record Final 2Pr of 64μC/cm2 at Record 5E12 Endurance Using Low Lattice Misfit (2.9%) β-W
Part Of
Technical Digest - International Electron Devices Meeting, IEDM
Start Page
1
End Page
4
ISBN (of the container)
979-835036542-9
Date Issued
2024-12-07
Author(s)
Guan-Hua Chen
Yu-Tsung Liao
Zefu Zhao
Yu-Rui Chen
Yun-Wen Chen
Wei-Jen Chen
Wei-Teng Hsu
Hao-Yi Lu
Ming-Chang Liu
Yu-An Chen
Event(s)
2024 IEEE International Electron Devices Meeting, IEDM 2024
Publisher
IEEE
Type
conference paper