On the design of the latch mechanism for wafer containers in a SMIF environment

Journal

Journal of Mechanical Science and Technology

Journal Volume

20

Journal Issue

12

Pages

2025-2033

Date Issued

2006

Author(s)

Lee, J.-J.

Chen, D.-Z.

Pai, W.-M.

DOI

10.1007/BF02916319

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447180

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247170914&doi=10.1007%2fBF02916319&partnerID=40&md5=45d32b485c2cc95c04ae15fffcde2529

Type

journal article