Wettability of amorphous diamond-like carbons deposited on Si and PMMA in pulse-modulated plasmas

Journal

IEEE Transactions on Plasma Science

Journal Volume

40

Journal Issue

7 PART 1

Pages

1837-1842

Date Issued

2012

Author(s)

Sung T.-L.

Yang J.H.-C.

Teii K.

Teii S.

Liu C.-M.

Ono S.

DOI

10.1109/TPS.2012.2196057

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863718555&doi=10.1109%2fTPS.2012.2196057&partnerID=40&md5=98979d279f2a8d89465b9d1702520d8e

https://scholars.lib.ntu.edu.tw/handle/123456789/569288

SDGs

[SDGs]SDG6

Type

journal article