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  5. Wettability of amorphous diamond-like carbons deposited on Si and PMMA in pulse-modulated plasmas
 
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Wettability of amorphous diamond-like carbons deposited on Si and PMMA in pulse-modulated plasmas

Journal
IEEE Transactions on Plasma Science
Journal Volume
40
Journal Issue
7 PART 1
Pages
1837-1842
Date Issued
2012
Author(s)
Sung T.-L.
Yang J.H.-C.
Teii K.
Teii S.
Liu C.-M.
WAN-YU TSENG  
LI-DEH LIN  
Ono S.
DOI
10.1109/TPS.2012.2196057
URI
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863718555&doi=10.1109%2fTPS.2012.2196057&partnerID=40&md5=98979d279f2a8d89465b9d1702520d8e
https://scholars.lib.ntu.edu.tw/handle/123456789/569288
Abstract
Pulse-modulated direct-current methane plasmas are used to deposit amorphous diamond-like carbon films on Si and dentistry-use polymethyl methacrylate (PMMA) substrates as a function of the negative pulse voltage applied to the substrate (V max ). The films on PMMA show a transition from diamond-like to more graphitic carbon in the Raman spectra with increasing V max , dissimilar to those on Si. This is attributed to easy deformation of PMMA, leading to the low compressive stress of the films (1 to 2 GPa). The contact angle of water for the films on both Si and PMMA is large, ranging from 79° to 94° almost independent of V max , confirming that the films are hydrophobic despite the difference in carbon bonding state. The large dispersion component (41-43 mJ/m 2 ) of the surface free energy of the films measured from the contact angle of water and 1-bromonaphthalene indicates the high mass density of the films. The small polar component (0.2-3.5 mJ/m 2 ) is attributed to hydrogen saturation of the surface sites forming nonpolar C-H bonds and, thus, responsible for the hydrophobic behavior.
SDGs

[SDGs]SDG6

Type
journal article

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