The affinity of Si-N and Si-C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

Journal

Diamond and Related Materials

Journal Volume

14

Journal Issue

3-7

Pages

1126-1130

Date Issued

2005

Author(s)

Huang C.C.

Lin Y.Y.

K.H. Chen

DOI

10.1016/j.diamond.2004.10.045

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-18444418316&doi=10.1016%2fj.diamond.2004.10.045&partnerID=40&md5=81ec57d2f27919815025be62387f5cf9

https://scholars.lib.ntu.edu.tw/handle/123456789/432879

Type

conference paper