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College of Engineering / 工學院
Materials Science and Engineering / 材料科學與工程學系
The affinity of Si-N and Si-C bonding in amorphous silicon carbon nitride (a-SiCN) thin film
Details
The affinity of Si-N and Si-C bonding in amorphous silicon carbon nitride (a-SiCN) thin film
Journal
Diamond and Related Materials
Journal Volume
14
Journal Issue
3-7
Pages
1126-1130
Date Issued
2005
Author(s)
Chen C.W.
Huang C.C.
Lin Y.Y.
Chen L.C.
K.H. Chen
DOI
10.1016/j.diamond.2004.10.045
URI
https://www.scopus.com/inward/record.uri?eid=2-s2.0-18444418316&doi=10.1016%2fj.diamond.2004.10.045&partnerID=40&md5=81ec57d2f27919815025be62387f5cf9
https://scholars.lib.ntu.edu.tw/handle/123456789/432879
Type
conference paper