https://scholars.lib.ntu.edu.tw/handle/123456789/432879
Title: | The affinity of Si-N and Si-C bonding in amorphous silicon carbon nitride (a-SiCN) thin film | Authors: | Chen C.W. Huang C.C. Lin Y.Y. Chen L.C. CHUN-WEI CHEN LI-CHYONG CHEN |
Issue Date: | 2005 | Journal Volume: | 14 | Journal Issue: | 3-7 | Start page/Pages: | 1126-1130 | Source: | Diamond and Related Materials | URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-18444418316&doi=10.1016%2fj.diamond.2004.10.045&partnerID=40&md5=81ec57d2f27919815025be62387f5cf9 https://scholars.lib.ntu.edu.tw/handle/123456789/432879 |
ISSN: | 09259635 | DOI: | 10.1016/j.diamond.2004.10.045 |
Appears in Collections: | 材料科學與工程學系 |
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