Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage
Journal
Review of Scientific Instruments
Journal Volume
78
Journal Issue
6
Date Issued
2007
Author(s)
Abstract
In this study, a laser linear encoder with three degrees of freedom (3-DOFs) based on diffraction and interference was developed to measure the linear displacement and two angular errors of a linear moving stage. Parts of the linear motion errors induced from the two angular errors can be calculated by this prototype 3-DOF laser encoder. It was an effective method for online error calculation and compensation to improve precision stage performance. This new function was superior to other laser encoders. The verification results showed that the resolution is 20 nm. It detected displacements relative to an external grating scale with accuracy of about ±150 nm for a measuring range of ±1 mm, and detected the angular errors with related accuracy of about ±1 arc sec for a measuring range of ±100 arc sec. ? 2007 American Institute of Physics.
Subjects
Diffraction
Diffraction gratings
Error analysis
Laser applications
Precision balances
Signal interference
Verification
Angular errors
Grating scale
Linear encoder
Linear motion
Degrees of freedom (mechanics)
article
equipment
equipment design
evaluation
instrumentation
laser
methodology
motion
refractometry
reproducibility
sensitivity and specificity
signal processing
three dimensional imaging
Equipment Design
Equipment Failure Analysis
Imaging, Three-Dimensional
Lasers
Motion
Refractometry
Reproducibility of Results
Sensitivity and Specificity
Signal Processing, Computer-Assisted
SDGs
Type
journal article