https://scholars.lib.ntu.edu.tw/handle/123456789/611969
標題: | Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage | 作者: | Huang H.-L. Liu C.-H. Jywe W.-Y. Wang M.-S. Fang T.-H. Wen-Yuh Jywe |
關鍵字: | Diffraction;Diffraction gratings;Error analysis;Laser applications;Precision balances;Signal interference;Verification;Angular errors;Grating scale;Linear encoder;Linear motion;Degrees of freedom (mechanics);article;equipment;equipment design;evaluation;instrumentation;laser;methodology;motion;refractometry;reproducibility;sensitivity and specificity;signal processing;three dimensional imaging;Equipment Design;Equipment Failure Analysis;Imaging, Three-Dimensional;Lasers;Motion;Refractometry;Reproducibility of Results;Sensitivity and Specificity;Signal Processing, Computer-Assisted | 公開日期: | 2007 | 卷: | 78 | 期: | 6 | 來源出版物: | Review of Scientific Instruments | 摘要: | In this study, a laser linear encoder with three degrees of freedom (3-DOFs) based on diffraction and interference was developed to measure the linear displacement and two angular errors of a linear moving stage. Parts of the linear motion errors induced from the two angular errors can be calculated by this prototype 3-DOF laser encoder. It was an effective method for online error calculation and compensation to improve precision stage performance. This new function was superior to other laser encoders. The verification results showed that the resolution is 20 nm. It detected displacements relative to an external grating scale with accuracy of about ±150 nm for a measuring range of ±1 mm, and detected the angular errors with related accuracy of about ±1 arc sec for a measuring range of ±100 arc sec. ? 2007 American Institute of Physics. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-34547381809&doi=10.1063%2f1.2743165&partnerID=40&md5=b1ca839d71fa44ecf22181b9002a2dcd https://scholars.lib.ntu.edu.tw/handle/123456789/611969 |
DOI: | 10.1063/1.2743165 |
顯示於: | 機械工程學系 |
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