Optimum sampling for track PEB CD integrated metrology

Journal

2009 IEEE International Conference on Automation Science and Engineering

Pages

439-442

Date Issued

2009

Author(s)

Chen, A.

Hsueh, S.

DOI

10.1109/COASE.2009.5234083

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467245

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449103241&doi=10.1109%2fCOASE.2009.5234083&partnerID=40&md5=bed1f9a8d8e02a533cce729260f3b9a0

Type

conference paper