Carbon nanotube growth by rapid thermal processing
Journal
Diamond and Related Materials
Journal Volume
10
Journal Issue
9-10
Pages
1810-1813
Date Issued
2001
Author(s)
Abstract
A new method for carbon nanotube (CNT) growth by rapid thermal processing (RTP) of amorphous carbon film is reported. This is a two-step method, involving an ion-beam sputtering process followed by an RTP treatment. Amorphous carbon film containing iron was first deposited by ion-beam sputtering. The as-deposited films were then annealed by RTP under an inert environment. High-density multi-wall carbon nanotubes with a length of 1 μm and a diameter of approximately 30 nm were observed on the surface of amorphous carbon film after RTP at 1200°C for 30 s in nitrogen (N2). Detailed morphology and structure analyses of carbon nanotubes thus obtained using SEM and HR-TEM indicated that the number density and growth rate of the CNT were dependent on the process temperature and ambient gas. The use of RTP provides a straightforward, convenient and cost-effective method to grow carbon nanotubes with controllable length and density. © 2001 Elsevier Science B.V. All rights reserved.
Subjects
Carbon nanotubes;Rapid thermal processing
Other Subjects
Amorphous films;Cost effectiveness;Film growth;Ion beams;Morphology;Rapid thermal annealing;Sputtering;Structural analysis;Carbon films;Carbon nanotubes;nanotube
Type
journal article