https://scholars.lib.ntu.edu.tw/handle/123456789/616423
標題: | Carbon nanotube growth by rapid thermal processing | 作者: | Wong T.S. Wang C.T. Chen K.H. Chen L.C. Ma K.J. LI-CHYONG CHEN |
關鍵字: | Carbon nanotubes;Rapid thermal processing | 公開日期: | 2001 | 卷: | 10 | 期: | 9-10 | 起(迄)頁: | 1810-1813 | 來源出版物: | Diamond and Related Materials | 摘要: | A new method for carbon nanotube (CNT) growth by rapid thermal processing (RTP) of amorphous carbon film is reported. This is a two-step method, involving an ion-beam sputtering process followed by an RTP treatment. Amorphous carbon film containing iron was first deposited by ion-beam sputtering. The as-deposited films were then annealed by RTP under an inert environment. High-density multi-wall carbon nanotubes with a length of 1 μm and a diameter of approximately 30 nm were observed on the surface of amorphous carbon film after RTP at 1200°C for 30 s in nitrogen (N2). Detailed morphology and structure analyses of carbon nanotubes thus obtained using SEM and HR-TEM indicated that the number density and growth rate of the CNT were dependent on the process temperature and ambient gas. The use of RTP provides a straightforward, convenient and cost-effective method to grow carbon nanotubes with controllable length and density. © 2001 Elsevier Science B.V. All rights reserved. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035449989&doi=10.1016%2fS0925-9635%2801%2900454-X&partnerID=40&md5=c6ed0d1fab2855d8da28702677362427 https://scholars.lib.ntu.edu.tw/handle/123456789/616423 |
ISSN: | 09259635 | DOI: | 10.1016/S0925-9635(01)00454-X | SDG/關鍵字: | Amorphous films;Cost effectiveness;Film growth;Ion beams;Morphology;Rapid thermal annealing;Sputtering;Structural analysis;Carbon films;Carbon nanotubes;nanotube |
顯示於: | 凝態科學研究中心 |
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