Deposition of silicon carbon nitride films by ion beam sputtering
Journal
Thin Solid Films
Journal Volume
355
Pages
417-422
Date Issued
1999
Author(s)
Wu, J. J.
Wu, C. T.
Liao, Y. C.
Lu, T. R.
Chen, L. C.
Chen, K. H.
Hwa, L. G.
Kuo, C. T.
Type
journal article