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College of Electrical Engineering and Computer Science / 電機資訊學院
Electronics Engineering / 電子工程學研究所
Fogging Effect Aware Placement in Electron Beam Lithography
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Fogging Effect Aware Placement in Electron Beam Lithography
Journal
Design Automation Conference
Journal Volume
Part 128280
Date Issued
2017
Author(s)
Huang, Y.-C.
Chang, Y.-W.
DOI
10.1145/3061639.3062252
URI
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85023642530&doi=10.1145%2f3061639.3062252&partnerID=40&md5=290fc1f6ffca2067d51a711a4b17d0b8
https://scholars.lib.ntu.edu.tw/handle/123456789/405639
Type
conference paper