Fogging Effect Aware Placement in Electron Beam Lithography

Journal

Design Automation Conference

Journal Volume

Part 128280

Date Issued

2017

Author(s)

Huang, Y.-C.

DOI

10.1145/3061639.3062252

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85023642530&doi=10.1145%2f3061639.3062252&partnerID=40&md5=290fc1f6ffca2067d51a711a4b17d0b8

https://scholars.lib.ntu.edu.tw/handle/123456789/405639

SDGs

[SDGs]SDG16

Type

conference paper