Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range

Journal

2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings

Journal Volume

2017-January

Pages

1-2

Date Issued

2017

Author(s)

Li, Y.-Y.

Lee, Y.-W.

Wu, I.-C.

SHENG-LUNG HUANG

DOI

10.1364/CLEO_AT.2017.AF2B.6

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/501306

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85044256255&doi=10.1364%2fCLEO_AT.2017.AF2B.6&partnerID=40&md5=9f008ce03448dea4703c46247bca2f09

Type

conference paper