Surface-enhanced Raman spectroscopy (SERS) of textured structures with anti-reflection by wet etching and island lithography
Journal
JSAP-OSA Joint Symposia2015 (The 76th JSAP Autumn Meeting 2015)
ISBN
978-4-86348-541-9
Date Issued
2015
Author(s)
Hsin-Chia Ho
Bo-Kai Chao
Hsin-Hung Cheng
Li-Wei Nien
Miin-Jang Chen
Tadaaki Nagao
Chun-Hway Hsueh*
Abstract
SERS has attracted much attention due to its great potential in analytical science and technology. For SERS substrates, ion beam [1] or electron beam lithography [2] have been widely used for fabricating periodic nanostructures which can bring very strong electromagnetic field enhancements. However, the slow processing efficiency and high-cost of these techniques limit the mass production. In this study, the process with low cost and easy fabrication of random nanostructures was evaluated to obtain high roughness and low reflectance textured surfaces via wet etching and island lithography. In particular, the reflectance and Raman spectrum for micro-pyramid and nanopillar structures were discussed. The reflectances of different structures were simulated using finite-difference time-domain (FDTD) method and the results were compared with the experimental measurements. © 2015 Japan Society of Applied Physics, Optical Society of America.
Other Subjects
Antireflection; Surface enhanced Raman spectroscopy; Raman spectroscopy
Type
conference paper