https://scholars.lib.ntu.edu.tw/handle/123456789/590855
標題: | Surface-enhanced Raman spectroscopy (SERS) of textured structures with anti-reflection by wet etching and island lithography | 作者: | Hsin-Chia Ho Bo-Kai Chao Hsin-Hung Cheng Li-Wei Nien Miin-Jang Chen Tadaaki Nagao JIA-HAN LI Chun-Hway Hsueh* |
公開日期: | 2015 | 來源出版物: | JSAP-OSA Joint Symposia2015 (The 76th JSAP Autumn Meeting 2015) | 摘要: | SERS has attracted much attention due to its great potential in analytical science and technology. For SERS substrates, ion beam [1] or electron beam lithography [2] have been widely used for fabricating periodic nanostructures which can bring very strong electromagnetic field enhancements. However, the slow processing efficiency and high-cost of these techniques limit the mass production. In this study, the process with low cost and easy fabrication of random nanostructures was evaluated to obtain high roughness and low reflectance textured surfaces via wet etching and island lithography. In particular, the reflectance and Raman spectrum for micro-pyramid and nanopillar structures were discussed. The reflectances of different structures were simulated using finite-difference time-domain (FDTD) method and the results were compared with the experimental measurements. © 2015 Japan Society of Applied Physics, Optical Society of America. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85077214380&partnerID=40&md5=fa9828dc9953f5f6ca6ca2e99083c690 https://www.osapublishing.org/abstract.cfm?uri=jsap-2015-13p_2C_11&origin=search https://scholars.lib.ntu.edu.tw/handle/123456789/590855 |
ISBN: | 978-4-86348-541-9 | SDG/關鍵字: | Antireflection; Surface enhanced Raman spectroscopy; Raman spectroscopy |
顯示於: | 工程科學及海洋工程學系 |
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