Numerical Simulation of Air Flow in the Mini-environment and SMIF Enclosure

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

16

Journal Issue

1

Pages

pp.60-67

Date Issued

2003

Author(s)

Huan-Ruei Shiu

Hsiao-Yi Huang

Sih-Li Chen

Ming-Tsun Ke

URI

http://www.jmech.org.tw/

https://scholars.lib.ntu.edu.tw/handle/123456789/584190

Type

journal article