Study on 193nm immersion interference lithography

Journal

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Journal Volume

5720

Pages

94-108

Date Issued

2005

Author(s)

Wang, L.A.

Chang, W.C.

Chi, K.Y.

Liu, S.K.

Lee, C.D.

DOI

10.1117/12.600795

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/497266

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-21844434216&doi=10.1117%2f12.600795&partnerID=40&md5=01557cc3a1d3035984c1c1434d9f24a2

Type

conference paper