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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structures
Details
A Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structures
Journal
Japanese Journal of Applied Physics
Journal Volume
45
Journal Issue
1A
Pages
305-310
Date Issued
2006
Author(s)
Y.-J. Yang
W.-C. Kuo
K.-C. Fan
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587856
Type
journal article
