Localized CO2 laser annealing induced dehydrogenation/ablation and optical refinement of silicon-rich silicon dioxide film with embedded Si nanocrystals
Journal
Journal of Nanoscience and Nanotechnology
Journal Volume
6
Journal Issue
12
Pages
3710-3717
Date Issued
2006
Author(s)
Lin, Gong-Ru
Lin, Chun-Jung
Chou, Li-Jen
GONG-RU LIN
Type
journal article