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College of Engineering / 工學院
Applied Mechanics / 應用力學研究所
Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pulling
Details
Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pulling
Journal
Journal of Micromechanics and Microengineering
Journal Volume
30
Journal Issue
1
Date Issued
2020
Author(s)
Liu, J.-R.
Li, W.-C.
WEI-CHANG LI
DOI
10.1088/1361-6439/ab50ef
URI
https://www.scopus.com/inward/record.url?eid=2-s2.0-85081091904&partnerID=40&md5=3f36c826a26368074c866327baa8e1d2
https://scholars.lib.ntu.edu.tw/handle/123456789/546891
SDGs
[SDGs]SDG7
[SDGs]SDG9
Type
journal article
