A study of the use of the planar encoder system for the geometric error tests of CNC machine tools
Journal
Proceedings of the Second International Symposium on Instrumentation Science and Technology
Journal Volume
3
Pages
3/433-3/439
Date Issued
2002
Author(s)
Abstract
In this paper, a new product for a semi-conductor manufacturing device, a planar encoder system, is introduced for geometric error test of a CNC machine tool. The principle of the application is described. For the geometric error test, 12 specified test paths are provided to calibrate the 21 error components. Selection of test path is possible for identified error component.
Subjects
Calibration
Contour measurement
Electrooptical devices
Interferometers
Measurement errors
Sensors
Geometric error tests
Planar encoder system
Machine tools
Type
conference paper