Direct impurity analysis of semiconductor photoresist samples with laser ablation ICP-MS

Journal

Journal of Analytical Atomic Spectrometry

Journal Volume

17

Journal Issue

4

Pages

358-365

Date Issued

2002

Author(s)

Chi, P.-H.

Ko, F.-H.

Hsu, C.-T.

Chen, H.-L.

Yang, C.-K.

Sun, Y.-C.

Yang, M.-H.

DOI

10.1039/b110070j

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491389

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036010485&doi=10.1039%2fb110070j&partnerID=40&md5=32960bdbca5f7c1a2a01250ae2cd3e3b

Type

journal article