Development of a diffraction-type optical triangulation sensor
Journal
Applied Optics
Journal Volume
43
Journal Issue
30
Pages
5607-5613
Date Issued
2004
Author(s)
Abstract
We propose a diffraction-type optical triangulation sensor based on the diffraction theorem and the laser triangulation method. The advantage of the proposed sensor is that it obtains not only the linear displacement of a moving object but also its three angular motion errors. The developed sensor is composed mainly of a laser source, two quadrant detectors, and a reflective diffraction grating. The reflective diffraction grating can reflect the incident laser beam into several diffractive rays, and two quadrant detectors were set up for detecting the position of 0- and + 1-order diffraction rays. According to the optical triangulation relationship between the spatial incident angles of a laser beam and the output coordinates of two quadrant detectors, the displacement and the three angular motion errors of a moving object can be obtained simultaneously. ? 2004 Optical Society of America.
Subjects
Demagnetization
Detectors
Diffraction gratings
Kinematics
Laser beams
Light scattering
Optical beam splitters
Diffractive rays
Laser sources
Motion errors
Quadrant detectors
Optical sensors
Type
journal article