https://scholars.lib.ntu.edu.tw/handle/123456789/611997
標題: | Development of a diffraction-type optical triangulation sensor | 作者: | Liu C.-H. Jywe W.-Y. Chen C.-K. Wen-Yuh Jywe |
關鍵字: | Demagnetization;Detectors;Diffraction gratings;Kinematics;Laser beams;Light scattering;Optical beam splitters;Diffractive rays;Laser sources;Motion errors;Quadrant detectors;Optical sensors | 公開日期: | 2004 | 卷: | 43 | 期: | 30 | 起(迄)頁: | 5607-5613 | 來源出版物: | Applied Optics | 摘要: | We propose a diffraction-type optical triangulation sensor based on the diffraction theorem and the laser triangulation method. The advantage of the proposed sensor is that it obtains not only the linear displacement of a moving object but also its three angular motion errors. The developed sensor is composed mainly of a laser source, two quadrant detectors, and a reflective diffraction grating. The reflective diffraction grating can reflect the incident laser beam into several diffractive rays, and two quadrant detectors were set up for detecting the position of 0- and + 1-order diffraction rays. According to the optical triangulation relationship between the spatial incident angles of a laser beam and the output coordinates of two quadrant detectors, the displacement and the three angular motion errors of a moving object can be obtained simultaneously. ? 2004 Optical Society of America. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-8344284331&doi=10.1364%2fAO.43.005607&partnerID=40&md5=10cfd9ad0ef707dbc9be5d4796341cc4 https://scholars.lib.ntu.edu.tw/handle/123456789/611997 |
DOI: | 10.1364/AO.43.005607 |
顯示於: | 機械工程學系 |
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