Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition

Journal

Nanoscale Research Letters

Journal Volume

15

Journal Issue

1

Date Issued

2020

Author(s)

Cheng, Y.-C.

Wang, H.-C.

Feng, S.-W.

Li, T.-P.

Fung, S.-K.

Yuan, K.-Y.

Chen, M.-J.

DOI

10.1186/s11671-020-03382-1

URI

https://www.scopus.com/inward/record.url?eid=2-s2.0-85088776922&partnerID=40&md5=3e686b44523b937049264156606172fe

https://scholars.lib.ntu.edu.tw/handle/123456789/546711

Type

journal article