A micromechanical high-Q elliptic disk displacement amplifier

Journal

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Journal Volume

2016-February

Pages

663-666

Date Issued

2016

Author(s)

Li, W.-C.

Ren, Z.

Nguyen, C.T.-C.

DOI

URI

URL

Type

conference paper