Macromodels of 3D lateral viscous damping effects for MEMS devices

Journal

12th International Conference on Solid-State Sensors, Actuators and Microsystems

Journal Volume

2

Pages

1848-1851

Date Issued

2003

Author(s)

Yen, P.-C.

Yang, Y.-J.

DOI

10.1109/SENSOR.2003.1217148

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448557

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-6344262641&doi=10.1109%2fSENSOR.2003.1217148&partnerID=40&md5=33d5979a8cb0c981b12a9fc83332551e

Type

conference paper