Rapidly selective growth of nanoparticles by electron-beam and optical lithographies with chemically amplified resists

Journal

Electrochemical and Solid-State Letters

Journal Volume

8

Journal Issue

2

Date Issued

2005

Author(s)

Chen, H.L.

Chu, Y.H.

Kuo, C.I.

Liu, F.K.

Ko, F.H.

Chu, T.C.

DOI

10.1149/1.1845051

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491353

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-13444270465&doi=10.1149%2f1.1845051&partnerID=40&md5=56555151a4df2a387f35a1942c6be88f

Type

journal article