Automatic probe alignment for atomic force microscope

Journal

Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05

Journal Volume

2005

Pages

909-912

Date Issued

2005

Author(s)

Hung, S.-K.

Tsai, C.-F.

Hsu, Y.-P.

Tzou, D.-J.

Lin, M.-H.

DOI

10.1109/ICMECH.2005.1529383

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/488926

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748887229&doi=10.1109%2fICMECH.2005.1529383&partnerID=40&md5=f3a299d1377f5d3b826b5f97f7ccb086

Type

conference paper