Automatic probe alignment for atomic force microscope
Journal
Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05
Journal Volume
2005
Pages
909-912
Date Issued
2005
Author(s)
Abstract
We built an atomic force microscope (AFM) system in combination with a robotic manipulator to help users in two rigorous tasks: to load the probe and to align the optical detection path. A novel z-tracking optical design, which allows vertical probe scan is also proposed. This method enhances the scan speed for massive samples.
Type
conference paper