Deep ultraviolet enhanced wet chemical etching of gallium nitride

Journal

Applied Physics Letters

Journal Volume

72

Journal Issue

8

Pages

939-941

Date Issued

1998

Author(s)

Chuang, C.-W.

Ho, J.-K.

Huang, C.-N.

Chen, C.-Y.

DOI

10.1063/1.120879

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/499549

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0000733746&doi=10.1063%2f1.120879&partnerID=40&md5=ebf60db02a522d6d78b297d3dbbfd876

Type

journal article