Plasma power controlled deposition of SiOx with manipulated Si quantum dot size for photoluminescent wavelength tailoring

Journal

Optics Express

Journal Volume

18

Journal Issue

5

Pages

4449-4456

Date Issued

2010

Author(s)

Lai, B.-H.

Cheng, C.-H.

Pai, Y.-H.

DOI

10.1364/OE.18.004449

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/500130

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77749304266&doi=10.1364%2fOE.18.004449&partnerID=40&md5=a770992911e571994752df1ce9c947e1

Type

journal article