Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents

Resource

Journal of Materials Chemistry 13: 1999-2006

Journal

Journal of Materials Chemistry

Journal Volume

13

Journal Issue

8

Pages

1999-2006

Date Issued

2003

Author(s)

Lai, Ying-Hui

Chen, Yao-Lun

Chi, Yun

Liu, Chao-Shiuan

Carty, Arthur J.

Lee, Gene-Hsiang

DOI

URI

SDGs

[SDGs]SDG6

Type

journal article

File(s)

Name

341.pdf

Size

329.75 KB

Format

Adobe PDF

Checksum

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