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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Computational study of variations in gap size for the electrostatic levitating force of MEM device using Dual BEM
Details
Computational study of variations in gap size for the electrostatic levitating force of MEM device using Dual BEM
Journal
Microelectronics journal
Journal Volume
35
Pages
739-748
Date Issued
2004
Author(s)
S.W. Chyuan
Y.S. Liao
J.T Chen
YUNN-SHIUAN LIAO
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/589592
Type
journal article
