https://scholars.lib.ntu.edu.tw/handle/123456789/589592| Title: | Computational study of variations in gap size for the electrostatic levitating force of MEM device using Dual BEM | Authors: | S.W. Chyuan Y.S. Liao J.T Chen YUNN-SHIUAN LIAO |
Issue Date: | 2004 | Journal Volume: | 35 | Start page/Pages: | 739-748 | Source: | Microelectronics journal | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/589592 |
| Appears in Collections: | 機械工程學系 |
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