A linnik scanning white-light interferometry system using a MEMS digital-to-analog converter

Journal

Procedia Engineering

Journal Volume

5

Pages

758-761

Date Issued

2010

Author(s)

Liao, H.-H.

Yang, Y.-J.

DOI

10.1016/j.proeng.2010.09.219

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448525

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-78650586212&doi=10.1016%2fj.proeng.2010.09.219&partnerID=40&md5=f8f1e287b3aea1b1866c4c62f49f2810

SDGs

[SDGs]SDG7

Type

conference paper