A linnik scanning white-light interferometry system using a MEMS digital-to-analog converter
Journal
Procedia Engineering
Journal Volume
5
Pages
758-761
Date Issued
2010
Author(s)
Abstract
In this work, we develop a scanning white-light interferometry (SWLI) system which uses a micromechanical digital-to-analog converter mirror module (M-DACMM) to introduce precise nano-scale phase steps. The M-DACMM converts a 4-bit digital signal to a mechanical out-of-plane displacement that is proportional to the analog value represented by the 4-bit binary code. A fabrication process is proposed to realize a large-area movable mirror without release holes. The measured full-scale displacement of the M-DACMM is 1050 nm, and the motion step is 72 nm, which is well suited for the SWLI system. The measurement results using the SWLI system, which phase steps are realized by the M-DACMM, is also demonstrated.
SDGs
Type
conference paper