A tracking measurement method based on the symmetry of surface by using a diffraction laser beam system
Journal
Proceedings of the Second International Symposium on Instrumentation Science and Technology
Pages
4/148-4/152
Date Issued
2002
Author(s)
Abstract
In this paper, a measurement method based on differential position has been announced. The position can be measured and tracked by using a focusing and symmetric light beam(±1 order diffraction beams) that the profile of the tested surface such as cylinder or sphere can be obtained by using this method. To verify this concept, an experiment is hold with a slanted mirror and a taut-wire. The experimental result shows that the concept in this paper is feasible, and the axis of cylindroids or apex of the spheroid can be traced with a system precision of sub-micrometer.
Subjects
Cylinders (shapes)
Diffractive optics
Focusing
Micrometers
Mirrors
Position measurement
Spheres
Surface measurement
Diffraction laser beam system
Submicrometer
Laser beams
Type
conference paper