https://scholars.lib.ntu.edu.tw/handle/123456789/612008
標題: | A tracking measurement method based on the symmetry of surface by using a diffraction laser beam system | 作者: | Shyu L.-H. Fu Y.-F. Jywe W.-Y. Lee K.-C. Chen J.-J. Wen-Yuh Jywe |
關鍵字: | Cylinders (shapes);Diffractive optics;Focusing;Micrometers;Mirrors;Position measurement;Spheres;Surface measurement;Diffraction laser beam system;Submicrometer;Laser beams | 公開日期: | 2002 | 起(迄)頁: | 4/148-4/152 | 來源出版物: | Proceedings of the Second International Symposium on Instrumentation Science and Technology | 摘要: | In this paper, a measurement method based on differential position has been announced. The position can be measured and tracked by using a focusing and symmetric light beam(±1 order diffraction beams) that the profile of the tested surface such as cylinder or sphere can be obtained by using this method. To verify this concept, an experiment is hold with a slanted mirror and a taut-wire. The experimental result shows that the concept in this paper is feasible, and the axis of cylindroids or apex of the spheroid can be traced with a system precision of sub-micrometer. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0141539256&partnerID=40&md5=e1f842cc792eee7ed579211bae1827bf https://scholars.lib.ntu.edu.tw/handle/123456789/612008 |
顯示於: | 機械工程學系 |
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