CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars

Journal

Microsystem Technologies

Journal Volume

19

Journal Issue

2

Pages

151-157

Date Issued

2013

Author(s)

Yao, T.-F.

Yang, S.-Y.

DOI

10.1007/s00542-012-1727-2

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448159

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84878550734&doi=10.1007%2fs00542-012-1727-2&partnerID=40&md5=28eaca06066ed9291690637c499c6cb2

Type

journal article