Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm

Journal

Optics and Lasers in Engineering

Journal Volume

47

Journal Issue

2

Pages

237-251

Date Issued

2009

Author(s)

Chen, L.-C.

Huang, Y.-T.

Nguyen, X.L.

Chen, J.-L.

Chang, C.-C.

LIANG-CHIA CHEN

DOI

10.1016/j.optlaseng.2008.05.016

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447878

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-56949095728&doi=10.1016%2fj.optlaseng.2008.05.016&partnerID=40&md5=41033dd64af0f32467fc0351dba14f7c

Type

journal article