Stitching periodic submicron fringes by utilizing step-and-align interference lithography
Journal
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Volume
27
Journal Issue
6
Pages
2951-2957
Date Issued
2009
Author(s)
Chen, Y.-P.
Chen, C.-H.
Chang, J.-H.
Chiu, H.-C.
Chen, G.-Y.
Chiang, C.-H.
Chen, L.-S.
Tseng, C.-T.
Lee, C.-H.
Yen, J.-Y.
Type
conference paper