Grey forecasting run-to-run control system in copper chemical mechanical polishing

Journal

International Journal of Advanced Manufacturing Technology

Journal Volume

41

Journal Issue

1-2

Pages

48-56

Date Issued

2009

Author(s)

Wang, G. J.

FENG-CHENG YANG

Wang, M. T.

Huang, M. L.

Chen, J.

Loh, K. N.

DOI

10.1007/s00170-008-1452-2

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-60949089197&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/347478

Type

journal article