Silicon surface grating formation with high power UV laser

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

3862

Pages

508-513

Date Issued

1999

Author(s)

Chen, Cheng-Yen

Chao, Chung-Yen

Gurtler, Steffen

Liu, Chee-Wee

Yang, C.C.

URI

Type

conference paper